- 专利标题: Magnetoresistance effect element, magnetic sensor and spin transistor
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申请号: US16877553申请日: 2020-05-19
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公开(公告)号: US11024727B2公开(公告)日: 2021-06-01
- 发明人: Hayato Koike
- 申请人: TDK CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: TDK CORPORATION
- 当前专利权人: TDK CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff PLC
- 优先权: JPJP2018-067658 20180330
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L29/82 ; G01R33/09 ; H01L29/45 ; H01L29/78 ; H01L29/04
摘要:
The magnetoresistance effect element includes a semiconductor layer, a first ferromagnetic layer and a second ferromagnetic layer. The semiconductor layer has a first region, a second region, and a third region. The first ferromagnetic layer is provided on the first region, the second ferromagnetic layer is provided on the second region, and the third region is sandwiched between the first region and the second region in the first direction. The third region has n-type (or p-type) conductivity, and crystal orientations of the semiconductor material in the direction are substantially the same in the first region, the second region, and the third region. An interatomic distance of the first region in the first direction in an upper surface neighboring region including the upper surface is larger (or smaller) than an interatomic distance of the third region in the first direction in an upper surface neighboring region including the upper surface.
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