- 专利标题: Organic vapor jet print head with orthogonal delivery and exhaust channels
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申请号: US16254998申请日: 2019-01-23
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公开(公告)号: US11033924B2公开(公告)日: 2021-06-15
- 发明人: Gregory McGraw , William E. Quinn , Matthew King
- 申请人: Universal Display Corporation
- 申请人地址: US NJ Ewing
- 专利权人: Universal Display Corporation
- 当前专利权人: Universal Display Corporation
- 当前专利权人地址: US NJ Ewing
- 代理机构: Butzel Long
- 主分类号: B05C5/02
- IPC分类号: B05C5/02 ; G03F7/00 ; H01L51/00 ; B05B7/00 ; H01L51/50
摘要:
Embodiments of the disclosed subject matter provide a device that may have a first depositor that includes one or more delivery apertures surrounded by one or more exhaust apertures, where the one or more delivery apertures and the one or more exhaust apertures are enclosed within a perimeter of a boss that protrudes from a substrate-facing side of the one or more delivery apertures. The delivery channels for the one or more delivery apertures and exhaust channels for the one or more exhaust apertures may be routed orthogonally to each other. The one or more delivery apertures may be configured to permit jets of delivery gas pass through a lower surface of the first depositor. The lower surface of the first depositor may include the one or more exhaust apertures to remove surplus vapor from a delivery zone. Embodiments may also provide a method of forming a print head.
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