Invention Grant
- Patent Title: Magnetic property measuring systems, methods for measuring magnetic properties, and methods for manufacturing magnetic memory devices using the same
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Application No.: US15933659Application Date: 2018-03-23
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Publication No.: US11037611B2Publication Date: 2021-06-15
- Inventor: Eunsun Noh , Juhyun Kim , Ung Hwan Pl
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: G11C11/16
- IPC: G11C11/16 ; G01R33/09 ; H01L43/10 ; H01L43/12

Abstract:
A magnetic property measuring system includes coil structures configured to apply a magnetic field to a sample, a light source configured to irradiate incident light to the sample, and a detector configured to detect polarization of light reflected from the sample. The magnetic field is perpendicular to a surface of the sample. Each coil structure includes a pole piece and a coil surrounding an outer circumferential surface of the pole piece. A wavelength of the incident light is equal to or less than about 580 nm.
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