- 专利标题: Method for forming an integrated circuit and an integrated circuit
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申请号: US16558750申请日: 2019-09-03
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公开(公告)号: US11037941B2公开(公告)日: 2021-06-15
- 发明人: Tzu-Yu Chen , Kuo-Chi Tu , Wen-Ting Chu , Yong-Shiuan Tsair
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: H01L27/11507
- IPC分类号: H01L27/11507 ; H01L27/11509 ; H01L21/311 ; H01L29/66 ; H01L21/762 ; H01L29/78 ; H01L29/06 ; H01L21/266 ; H01L21/321 ; H01L29/51 ; H01L21/3105 ; H01L29/08 ; H01L21/265
摘要:
A method for forming an integrated circuit (IC) and an IC are disclosed. The method for forming the IC includes: forming an isolation structure separating a memory semiconductor region from a logic semiconductor region; forming a memory cell structure on the memory semiconductor region; forming a memory capping layer covering the memory cell structure and the logic semiconductor region; performing a first etch into the memory capping layer to remove the memory capping layer from the logic semiconductor region, and to define a slanted, logic-facing sidewall on the isolation structure; forming a logic device structure on the logic semiconductor region; and performing a second etch into the memory capping layer to remove the memory capping layer from the memory semiconductor, while leaving a dummy segment of the memory capping layer that defines the logic-facing sidewall.
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