- 专利标题: Three-dimensional memory device having on-pitch drain select gate electrodes and method of making the same
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申请号: US16406283申请日: 2019-05-08
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公开(公告)号: US11037943B2公开(公告)日: 2021-06-15
- 发明人: Muneyuki Imai , James Kai
- 申请人: SANDISK TECHNOLOGIES LLC
- 申请人地址: US TX Addison
- 专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人地址: US TX Addison
- 代理机构: The Marbury Law Group PLLC
- 主分类号: H01L27/11556
- IPC分类号: H01L27/11556 ; H01L27/11582 ; G11C16/04 ; H01L29/06 ; H01L21/28
摘要:
An array of memory stack structures extends through an alternating stack of insulating layers and electrically conductive layers. The drain-select-level assemblies may be provided by forming drain-select-level openings through a drain-select-level sacrificial material layer, and by forming a combination of a cylindrical electrode portion and a first gate dielectric mayin each first drain-select-level opening while forming a second gate dielectric directly on a sidewall of each second drain-select-level opening in a second subset of the drain-select-level openings. A strip electrode portion is formed by replacing the drain-select-level sacrificial material layer with a conductive material. Structures filling the second subset of the drain-select-level openings may be used as dummy structures at a periphery of an array. The dummy structures are free of gate electrodes and thus prevents a leakage current therethrough.
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