- 专利标题: Semiconductor structure and method of forming the same
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申请号: US16998866申请日: 2020-08-20
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公开(公告)号: US11037983B2公开(公告)日: 2021-06-15
- 发明人: Chern-Yow Hsu , Yuan-Tai Tseng , Shih-Chang Liu
- 申请人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 申请人地址: TW Hsinchu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 当前专利权人地址: TW Hsinchu
- 代理机构: WPAT, P.C., Intellectual Property Attorneys
- 代理商 Anthony King
- 主分类号: H01L27/22
- IPC分类号: H01L27/22 ; H01L43/12 ; H01L43/02 ; H01L23/522
摘要:
The present disclosure provides a semiconductor structure, including a transistor layer, a memory region over the transistor layer, and a logic region adjacent to the memory region. The memory region includes a first Nth metal line, a magnetic tunneling junction (MTJ) over the first Nth metal line, a cap over the MTJ, a first stop layer on the cap; and a first (N+1)th metal via over the MTJ. The first (N+1)th metal via is laterally surrounded by the cap and the first stop layer. The logic region includes a second Nth metal line, a second stop layer being disposed over an (N+1)th metal line, and a second (N+1)th metal via over the (N+1)th metal line. N is an integer greater than or equal to 1. A method of manufacturing the semiconductor structure is also disclosed.
公开/授权文献
- US20200381477A1 SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME 公开/授权日:2020-12-03
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