Invention Grant
- Patent Title: Epi semiconductor material structures in source/drain regions of a transistor device formed on an SOI substrate
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Application No.: US16727453Application Date: 2019-12-26
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Publication No.: US11049955B2Publication Date: 2021-06-29
- Inventor: Shesh Mani Pandey , Jagar Singh , Judson R. Holt
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Agent Francois Pagette
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/165 ; H01L29/78 ; H01L29/06 ; H01L29/417

Abstract:
One illustrative device disclosed herein includes a transistor formed above a semiconductor-on-insulator (SOI) substrate, wherein the transistor comprises a gate structure, a sidewall spacer and source/drain regions, openings formed in the active layer in the source/drain regions adjacent the sidewall spacer, recesses formed in a buried insulation layer of the SOI substrate in the source/drain regions of the transistor, wherein the recesses extend laterally under a portion of the active layer, and an epi semiconductor material positioned in at least the recesses in the buried insulation layer.
Information query
IPC分类: