Invention Grant
- Patent Title: Plasma processing apparatus and plasma processing method
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Application No.: US16743788Application Date: 2020-01-15
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Publication No.: US11062882B2Publication Date: 2021-07-13
- Inventor: Yusuke Aoki , Shinya Morikita , Toshikatsu Tobana , Fumiya Takata
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JPJP2019-009476 20190123
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/3065

Abstract:
A plasma processing apparatus according to an exemplary embodiment includes a chamber, a substrate support, an upper electrode, a radio frequency power source, and a direct-current power source device. The substrate support includes a lower electrode. The lower electrode is provided in the chamber. The upper electrode is provided above the substrate support. The radio frequency power source generates a plasma in the chamber. The direct-current power source device is electrically connected to the upper electrode. The direct-current power source device is configured to periodically generate a pulsed negative direct-current voltage. An output voltage of the direct-current power source device is alternately switched between a negative direct-current voltage and zero volts.
Public/Granted literature
- US20200234925A1 PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD Public/Granted day:2020-07-23
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