Liquid material discharge device, coating device thereof, and coating method
摘要:
A liquid material discharge device (20) has a nozzle member (35) provided with a discharge opening (33) through which a liquid material is discharged, a switching valve (51) in communication with the nozzle member, and a discharge controller. The discharge device further includes a pressurization section (60) having a pressurization passage (62) through which the liquid material under pressurization is supplied to the switching valve, and a negative pressure section (70) including a shunt passage (72) where a pressure can be set to be relatively lower than that in the pressurization passage. The switching valve is changed over between a first position at which the discharge opening communicates with the pressurization passage and the discharge opening is cut off from the shunt passage, and a second position where the discharge opening is communicated with the shunt passage and the discharge opening is cut off from the pressurization passage.
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