- 专利标题: Acoustic wave device
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申请号: US15885276申请日: 2018-01-31
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公开(公告)号: US11082027B2公开(公告)日: 2021-08-03
- 发明人: Motoi Yamauchi
- 申请人: TAIYO YUDEN CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: TAIYO YUDEN CO., LTD.
- 当前专利权人: TAIYO YUDEN CO., LTD.
- 当前专利权人地址: JP Tokyo
- 代理机构: Chen Yoshimura LLP
- 优先权: JPJP2017-017850 20170202,JPJP2017-020744 20170207
- 主分类号: H03H9/02
- IPC分类号: H03H9/02 ; H03H9/05 ; H03H9/13 ; H03H9/145 ; H01L41/187
摘要:
An acoustic wave device includes: a first substrate made of a piezoelectric material; an acoustic wave element located on the first substrate; a bump located on the first substrate; a second substrate located on the first substrate through the bump, the second substrate facing the first substrate across an air gap; and a support layer that is located in at least a part of a periphery of the first substrate, is in contact with a side surface of the first substrate, and has a less linear thermal expansion coefficient than the first substrate.
公开/授权文献
- US20180219527A1 ACOUSTIC WAVE DEVICE 公开/授权日:2018-08-02
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