Surface property measuring device and control method for same
Abstract:
A surface property measuring device includes a measuring arm that is supported so as to be capable of circular arced movement, a stylus that is provided to a distal end of the measuring arm, a position change detector that detects a change in position of the measuring arm, and a measurement force applier (voice coil motor) that biases the measuring arm in a circular arced movement direction and applies a measurement force. A control device includes a central controller that outputs a measurement force instruction that issues an instruction for an orientation and size of the measurement force, and a measurement force controller that controls the orientation and size of the measurement force produced by the measurement force applier. The measurement force controller monitors a position change detection, and when a position change speed of the measuring arm exceeds a predetermined threshold value, applies feedback.
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