Invention Grant
- Patent Title: Method for locating devices
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Application No.: US16685938Application Date: 2019-11-15
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Publication No.: US11088016B2Publication Date: 2021-08-10
- Inventor: Marcel Broekaart , Ionut Radu , Chrystelle Lagahe Blanchard
- Applicant: Soitec
- Applicant Address: FR Crolles
- Assignee: Soitec
- Current Assignee: Soitec
- Current Assignee Address: FR Crolles
- Agency: TraskBritt
- Priority: FR1301697 20130715
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L27/146 ; H01L23/544

Abstract:
The disclosure relates to a process for locating devices, the process comprising the following steps: a) providing a carrier substrate comprising: a device layer; and alignment marks; b) providing a donor substrate; c) forming a weak zone in the donor substrate, the weak zone delimiting a useful layer; d) assembling the donor substrate and the carrier substrate; and e) fracturing the donor substrate in the weak zone so as to transfer the useful layer to the device layer; wherein the alignment marks are placed in cavities formed in the device layer, the cavities having an aperture flush with the free surface of the device layer.
Public/Granted literature
- US20200161172A1 METHOD FOR LOCATING DEVICES Public/Granted day:2020-05-21
Information query
IPC分类: