Invention Grant
- Patent Title: Layout structures with multiple fingers of multiple lengths
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Application No.: US16671414Application Date: 2019-11-01
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Publication No.: US11088075B2Publication Date: 2021-08-10
- Inventor: Souvick Mitra , Rainer Thoma , Harsh Shah , Anindya Nath , Robert J. Gauthier, Jr.
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Thompson Hine LLP
- Agent Francois Pagette
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L21/74 ; H01L29/417 ; H01L23/522
Abstract:
Back-end-of-line layout structures and methods of forming a back-end-of-line layout structure. A metallization level includes a plurality of interconnects positioned over a plurality of active device regions. The plurality of interconnects have a triangular-shaped layout and a plurality of lengths within the triangular-shaped layout.
Public/Granted literature
- US20210134719A1 LAYOUT STRUCTURES WITH MULTIPLE FINGERS OF MULTIPLE LENGTHS Public/Granted day:2021-05-06
Information query
IPC分类:
