- 专利标题: Method of forming a dummy die of an integrated circuit having an embedded annular structure
-
申请号: US16051848申请日: 2018-08-01
-
公开(公告)号: US11101260B2公开(公告)日: 2021-08-24
- 发明人: Shang-Yun Hou , Sung-Hui Huang , Kuan-Yu Huang , Hsien-Pin Hu , Yushun Lin , Heh-Chang Huang , Hsing-Kuo Hsia , Chih-Chieh Hung , Ying-Ching Shih , Chin-Fu Kao , Wen-Hsin Wei , Li-Chung Kuo , Chi-Hsi Wu , Chen-Hua Yu
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Slater Matsil, LLP
- 主分类号: H01L25/00
- IPC分类号: H01L25/00 ; H01L25/065 ; H01L23/24 ; H01L23/31 ; H01L23/498 ; H01L21/48 ; H01L25/18 ; H01L23/00
摘要:
An integrated circuit package and a method of forming the same are provided. The method includes attaching an integrated circuit die to a first substrate. A dummy die is formed. The dummy die is attached to the first substrate adjacent the integrated circuit die. An encapsulant is formed over the first substrate and surrounding the dummy die and the integrated circuit die. The encapsulant, the dummy die and the integrated circuit die are planarized, a topmost surface of the encapsulant being substantially level with a topmost surface of the dummy die and a topmost surface of the integrated circuit die. An interior portion of the dummy die is removed. A remaining portion of the dummy die forms an annular structure.
公开/授权文献
- US20190237454A1 INTEGRATED CIRCUIT PACKAGE AND METHOD OF FORMING SAME 公开/授权日:2019-08-01
信息查询
IPC分类: