发明授权
- 专利标题: Semiconductor structure with ultra thick metal and manufacturing method thereof
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申请号: US16389500申请日: 2019-04-19
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公开(公告)号: US11114378B2公开(公告)日: 2021-09-07
- 发明人: Chen-Fa Lu , Cheng-Yuan Tsai , Ching-Chung Hsu , Chung-Long Chang
- 申请人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 申请人地址: TW Hsinchu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 当前专利权人地址: TW Hsinchu
- 代理机构: WPAT, P.C.
- 代理商 Anthony King
- 主分类号: H01L29/00
- IPC分类号: H01L29/00 ; H01L23/522 ; H01L23/532 ; H01L21/027 ; H01L21/288 ; H01L21/311 ; H01L21/768 ; H01L23/31 ; H01L23/528
摘要:
The present disclosure provides a semiconductor structure having an ultra thick metal (UTM). The semiconductor structure includes a substrate, a metal layer over the substrate, and an UTM over the metal layer. An area density of the UTM is greater than 40% and a thickness of the UTM is equal to or greater than 6 micrometer. The present disclosure provides a method for manufacturing a semiconductor structure having a UTM. The method includes patterning a dielectric layer with a plurality of trenches by a first mask, patterning a photoresist positioning on a mesa between adjacent trenches by a second mask, and selectively plating conductive materials in the plurality of trenches.
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