Invention Grant
- Patent Title: Method for scanning a sample by a charged particle beam system
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Application No.: US16730875Application Date: 2019-12-30
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Publication No.: US11127563B2Publication Date: 2021-09-21
- Inventor: Adam Lyons , Thomas I. Wallow
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/04 ; G01N23/06 ; G01N23/203 ; G01N23/2251 ; H01J37/147
Abstract:
A method for scanning a sample by a charged particle beam tool is provided. The method includes providing the sample having a scanning area including a plurality of unit areas, scanning a unit area of the plurality of unit areas, blanking a next unit area of the plurality of unit areas adjacent to the scanned unit area, and performing the scanning and the blanking the plurality of unit areas until all of the unit areas are scanned.
Public/Granted literature
- US20200211820A1 METHOD FOR SCANNING A SAMPLE BY A CHARGED PARTICLE BEAM SYSTEM Public/Granted day:2020-07-02
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