- 专利标题: Storage device for storing wafer cassettes for use with a batch furnace
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申请号: US16765125申请日: 2018-11-26
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公开(公告)号: US11127617B2公开(公告)日: 2021-09-21
- 发明人: Adriaan Garssen
- 申请人: ASM IP Holding B.V.
- 申请人地址: NL Almere
- 专利权人: ASM IP Holding B.V.
- 当前专利权人: ASM IP Holding B.V.
- 当前专利权人地址: NL Almere
- 代理机构: Snell & Wilmer L.L.P.
- 国际申请: PCT/NL2018/050791 WO 20181126
- 国际公布: WO2019/103613 WO 20190531
- 主分类号: H01L21/677
- IPC分类号: H01L21/677
摘要:
A storage device for use with at least one batch furnace for batch treatment of wafers supported in a wafer boat is disclosed. The storage device comprises a cassette storage carousel for storing a plurality of wafer cassettes on rotatable platform stages. A carousel housing bounds a mini-environment chamber in which the platform stages are accommodated. A gas recirculation circuit of the storage device subsequently comprises a gas inlet channel, a gas inlet filter, the mini-environment chamber, a plurality of gas outlet openings in a bottom wall of the carousel housing, a plenum housing bounding a plenum chamber, a plenum chamber outlet, a gas circulation pump connecting the plenum chamber outlet to an inlet end of the gas inlet duct.
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