A method for manufacturing a female mold is provided in the embodiments of the disclosure, comprising: providing a substrate; forming a substrate layer of the female mold on the substrate; forming on the substrate layer of the female mold a mask layer which is adapted to exposure by an X-ray; and exposing the substrate layer of the female mold to the X-ray from a side of the mask layer away from the substrate. A direction in which the X-ray irradiates is inclined at a predetermined oblique angle to the substrate layer of the female mold, in the process of exposing to the X-ray. Besides, a female mold is also provided.