- 专利标题: Fin field effect transistor (FinFET) device and method
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申请号: US16669145申请日: 2019-10-30
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公开(公告)号: US11139295B2公开(公告)日: 2021-10-05
- 发明人: Chai-Wei Chang , Po-Chi Wu , Yi-Cheng Chao , Che-Cheng Chang
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Slater Matsil, LLP
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; H01L29/06 ; H01L29/423 ; H01L29/66 ; H01L21/3213 ; H01L21/8234 ; H01L21/762 ; H01L27/02 ; H01L29/49
摘要:
A FinFET device structure is provided. The FinFET device structure includes an isolation structure formed over a substrate and a fin structure formed over the substrate. The FinFET device structure includes a first gate structure and a second gate structure formed over the fin structure, and the first gate structure has a first width in a direction parallel to the fin structure, the second gate structure has a second width in a direction parallel to the fin structure, and the first width is smaller than the second width. The first gate structure includes a first work function layer having a first height. The second gate structure includes a second work function layer having a second height and a gap between the first height and the second height is in a range from about 1 nm to about 6 nm.
公开/授权文献
- US20200066719A1 Fin Field Effect Transistor (FinFET) Device and Method 公开/授权日:2020-02-27
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