- 专利标题: Method for setting processing device
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申请号: US16315645申请日: 2017-09-11
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公开(公告)号: US11141830B2公开(公告)日: 2021-10-12
- 发明人: Makoto Shimoda , Masaki Kanazawa
- 申请人: TOKYO SEIMITSU CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: TOKYO SEIMITSU CO., LTD.
- 当前专利权人: TOKYO SEIMITSU CO., LTD.
- 当前专利权人地址: JP Tokyo
- 代理机构: Fattibene and Fattibene LLC
- 代理商 Paul A. Fettibene
- 优先权: JPJP2016-189068 20160928
- 国际申请: PCT/JP2017/032611 WO 20170911
- 国际公布: WO2018/061721 WO 20180405
- 主分类号: B24B7/04
- IPC分类号: B24B7/04 ; B24B41/06 ; B24B7/22 ; H01L21/304
摘要:
Processing device for uniformly grinding wafers held by a plurality of chucks, and a method for setting the processing device. A processing device includes a coarse grinding device and a fine grinding device that are provided in a column straddling over a holding device. The holding device includes: an index table; chucks concentrically disposed about a rotation shaft; a first movable support unit on the outer peripheral side of the chuck in the radial direction of the index table; and a first fixed support unit on the inner peripheral side of the chuck in the radial direction of the index table. The first movable support unit is interposed between the index table and the chuck, and can be freely expanded and contracted in a vertical direction.
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