Invention Grant
- Patent Title: Reflector and method of manufacturing a reflector
-
Application No.: US16440099Application Date: 2019-06-13
-
Publication No.: US11145428B2Publication Date: 2021-10-12
- Inventor: Ferry Zijp
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP18178127 20180615
- Main IPC: G21K1/06
- IPC: G21K1/06 ; B24C1/08

Abstract:
Some embodiment describe a reflector comprising a hollow body having an interior surface defining a passage. The interior surface has an optical surface part configured to reflect radiation and a supporter surface part. The optical surface part has a predetermined optical power and the supporter surface part does not. The reflector can be made by providing an axially symmetric mandrel, shaping a part of the circumferential surface of the mandrel to form an inverse optical surface part that is not rotationally symmetric about the axis of the mandrel, forming a reflector body around the mandrel and releasing the reflector body from the mandrel whereby the reflector body has an optical surface defined by the inverse optical surface part and a supporter surface part defined by the rest of the outer surface of the mandrel.
Public/Granted literature
- US20190385760A1 Reflector and Method of Manufacturing a Reflector Public/Granted day:2019-12-19
Information query