Invention Grant
- Patent Title: Method for creating double bragg mirror for tight frequency reference control
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Application No.: US16553518Application Date: 2019-08-28
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Publication No.: US11146230B2Publication Date: 2021-10-12
- Inventor: Nicholas S Dellas , Brian Goodlin , Ricky Jackson
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Andrew R. Ralston; Charles A. Brill; Frank D. Cimino
- Main IPC: H03H9/00
- IPC: H03H9/00 ; H03H9/17 ; H01L33/46 ; H01L33/10 ; H01L21/02

Abstract:
A method for creating a double Bragg mirror is provided. The method comprises providing a wafer having a plurality of bulk acoustic wave (BAW) devices at an intermediate stage of manufacturing. A first dielectric layer is deposited over the wafer. A plurality of as-deposited thicknesses of the dielectric layer are determined, each as-deposited thickness corresponding to one BAW device from the plurality of BAW devices. A corresponding trimmed dielectric layer over each of the BAW devices is formed by removing a portion of the dielectric layer over each of the BAW devices, with a thickness of the removed portion determined from a corresponding as-deposited thickness and a target thickness. A Bragg acoustic reflector that includes the corresponding trimmed dielectric layer is formed over each of the BAW devices.
Public/Granted literature
- US20210067126A1 METHOD FOR CREATING DOUBLE BRAGG MIRROR FOR TIGHT FREQUENCY REFERENCE CONTROL Public/Granted day:2021-03-04
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