- 专利标题: Acoustic wave device
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申请号: US16732372申请日: 2020-01-02
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公开(公告)号: US11146237B2公开(公告)日: 2021-10-12
- 发明人: Shou Nagatomo
- 申请人: Murata Manufacturing Co., Ltd.
- 申请人地址: JP Nagaokakyo
- 专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人地址: JP Nagaokakyo
- 代理机构: Keating & Bennett, LLP
- 优先权: JPJP2019-005426 20190116
- 主分类号: H03H9/17
- IPC分类号: H03H9/17 ; H03H9/145 ; H03H9/58 ; H03H9/02
摘要:
An acoustic wave device includes a support substrate, an acoustic reflection film on the support substrate, a piezoelectric layer on the acoustic reflection film, the piezoelectric layer including first and second primary surfaces, and first and second flat-plate electrodes on the first and second primary surfaces of the piezoelectric layer. The acoustic reflection film includes high acoustic impedance layers and low acoustic impedance layers alternately stacked together. At least one layer of the high acoustic impedance and low acoustic impedance layers is a stack of layers of first and second materials having equal or substantially equal acoustic impedances for at least one of longitudinal acoustic impedance and transversal acoustic impedance. The interface between the layers of first and second materials has irregularities.
公开/授权文献
- US20200228092A1 ACOUSTIC WAVE DEVICE 公开/授权日:2020-07-16
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