发明授权
- 专利标题： Method and apparatus for collecting information used in image-error compensation
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申请号： US16927131申请日： 2020-07-13
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公开(公告)号： US11150561B2公开(公告)日： 2021-10-19
- 发明人: Hung-Wen Cho , Fu-Jye Liang , Chun-Kuang Chen , Chih-Tsung Shih , Li-Jui Chen , Po-Chung Cheng , Chin-Hsiang Lin
- 申请人： Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址： TW Hsinchu
- 专利权人： Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人： Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址： TW Hsinchu
- 代理机构： Birch, Stewart, Kolasch & Birch, LLP
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; G03F7/22 ; G03F1/22 ; G03F1/44 ; G03F1/36 ; G06T7/00
摘要：
A method for collecting information in image-error compensation is provided. The method includes providing a reticle having a first image structure and a second image structure; moving a light shading member to control a first exposure field; projecting a light over the first exposure field; recording an image of the first image structure after the light is projected; moving the light shading member to control a second exposure field; projecting the light over the second exposure field; and recording an image of the second image structure after the light is projected.
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