• Patent Title: Hybrid structure for a surface acoustic wave device
  • Application No.: US16313804
    Application Date: 2017-06-26
  • Publication No.: US11159140B2
    Publication Date: 2021-10-26
  • Inventor: Gweltaz GaudinIsabelle Huyet
  • Applicant: Soitec
  • Applicant Address: FR Bernin
  • Assignee: Soitec
  • Current Assignee: Soitec
  • Current Assignee Address: FR Bernin
  • Agency: TraskBritt
  • Priority: FR1656191 20160630
  • International Application: PCT/FR2017/051701 WO 20170626
  • International Announcement: WO2018/002504 WO 20180104
  • Main IPC: H03H9/02
  • IPC: H03H9/02 H01L41/08
Hybrid structure for a surface acoustic wave device
Abstract:
A hybrid structure for a surface acoustic wave device comprises a useful layer of piezoelectric material having a free first surface and a second surface disposed on a support substrate that has a lower coefficient of thermal expansion than that of the useful layer. The hybrid structure further comprises a trapping layer disposed between the useful layer and the support substrate, and at least one functional interface of predetermined roughness between the useful layer and the trapping layer.
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