Invention Grant
- Patent Title: Hybrid structure for a surface acoustic wave device
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Application No.: US16313804Application Date: 2017-06-26
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Publication No.: US11159140B2Publication Date: 2021-10-26
- Inventor: Gweltaz Gaudin , Isabelle Huyet
- Applicant: Soitec
- Applicant Address: FR Bernin
- Assignee: Soitec
- Current Assignee: Soitec
- Current Assignee Address: FR Bernin
- Agency: TraskBritt
- Priority: FR1656191 20160630
- International Application: PCT/FR2017/051701 WO 20170626
- International Announcement: WO2018/002504 WO 20180104
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H01L41/08

Abstract:
A hybrid structure for a surface acoustic wave device comprises a useful layer of piezoelectric material having a free first surface and a second surface disposed on a support substrate that has a lower coefficient of thermal expansion than that of the useful layer. The hybrid structure further comprises a trapping layer disposed between the useful layer and the support substrate, and at least one functional interface of predetermined roughness between the useful layer and the trapping layer.
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