发明授权
- 专利标题： Integrated circuits having dielectric layers including an anti-reflective coating
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申请号： US16584463申请日： 2019-09-26
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公开(公告)号： US11171200B2公开(公告)日： 2021-11-09
- 发明人: Poornika Fernandes , David Matthew Curran , Stephen Arion Meisner , Bhaskar Srinivasan , Guruvayurappan S. Mathur , Scott William Jessen , Shih Chang Chang , Russell Duane Fields , Thomas Terrance Lynch
- 申请人： TEXAS INSTRUMENTS INCORPORATED
- 申请人地址： US TX Dallas
- 专利权人： TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人： TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人地址： US TX Dallas
- 代理商 Jacqueline J. Garner; Charles A. Brill; Frank D. Cimino
- 主分类号： H01L49/02
- IPC分类号： H01L49/02 ; H01L21/02
摘要：
In some examples, an integrated circuit comprises a substrate; a first metal layer and a second metal layer positioned above the substrate; a first composite dielectric layer located on the first metal layer, wherein the first composite dielectric layer comprises a first anti-reflective coating; a second composite dielectric layer positioned on the second metal layer, wherein the second composite dielectric layer comprises a second anti-reflective coating; and a capacitor metal layer disposed over the first composite dielectric layer.
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