Invention Grant
- Patent Title: Method of unloading an object from a support table
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Application No.: US16617242Application Date: 2018-05-03
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Publication No.: US11175594B2Publication Date: 2021-11-16
- Inventor: Giovanna De Simone , Marco Adrianus Peter Van Den Heuvel , Thibault Simon Mathieu Laurent , Ruud Hendrikus Martinus Johannes Bloks , Niek Jacobus Johannes Roset , Justin Johannes Hermanus Gerritzen
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: EP17174583 20170606,EP18152220 20180118
- International Application: PCT/EP2018/061287 WO 20180503
- International Announcement: WO2018/224218 WO 20181213
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A method of unloading an object from a support table, the object clamped to the support table during an exposure process by: applying a first pressure to a central region of the support table under a central portion of the object; and applying a second pressure to a peripheral region of the support table under a peripheral portion of the object, wherein during clamping the first pressure and the second pressure are controlled such that liquid is retained between the object and a seal member that is positioned radially between the central region and the peripheral region at an upper surface of the support table and protrudes towards the object, the method including: increasing the first pressure towards ambient pressure; removing at least some of the liquid retained between the object and the seal member by decreasing the second pressure; and increasing the second pressure towards the ambient pressure.
Public/Granted literature
- US20210132510A1 METHOD OF UNLOADING AN OBJECT FROM A SUPPORT TABLE Public/Granted day:2021-05-06
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