Invention Grant
- Patent Title: Fine leveling of large carousel based susceptor
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Application No.: US16708308Application Date: 2019-12-09
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Publication No.: US11180846B2Publication Date: 2021-11-23
- Inventor: Kaushal Gangakhedkar
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: H01L21/687
- IPC: H01L21/687 ; C23C14/50 ; C23C16/458 ; C23C16/455
Abstract:
Pedestal assemblies with a thermal barrier plate, a torque plate and at least one kinematic mount to change a plane formed by the thermal barrier plate are described. Susceptor assemblies and processing chambers incorporating the pedestal assemblies are also described. Methods of leveling a susceptor to form parallel planes between the susceptor surface and a gas distribution assembly surface are also described.
Information query
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