Invention Grant
- Patent Title: Gas sensing device, electronic device including the gas sensing device, and gas sensing system
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Application No.: US16416704Application Date: 2019-05-20
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Publication No.: US11181508B2Publication Date: 2021-11-23
- Inventor: Si-hoon Lee , Min-chul Lee , Kwang-min Park , Jeong-ho Park
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2018-0130241 20181029
- Main IPC: G01N29/32
- IPC: G01N29/32 ; G01N29/02

Abstract:
A gas sensing system includes a driving circuit chip, and a gas sensor, a temperature sensor, and a humidity sensor, which are located on the driving circuit chip. The gas sensing system compensates a gas sensing result based on at least one of a temperature sensing result and a humidity sensing result and generates a gas sensing signal. The gas sensor includes a first resonator and a first sensing film being configured to sense a first gas and located on the first resonator to be exposed to the outside. The temperature sensor includes a second resonator and an encapsulation layer located above the second resonator not to expose the second resonator to the outside, and the humidity sensor includes a third resonator.
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