Invention Grant
- Patent Title: Electronic-component-embedded substrate having a wiring line with a roughened surface, electronic component device, and communication module
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Application No.: US16435591Application Date: 2019-06-10
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Publication No.: US11183453B2Publication Date: 2021-11-23
- Inventor: Takashi Iwamoto
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: Keating & Bennett, LLP
- Priority: JPJP2016-248201 20161221
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L23/29 ; H01L23/00 ; H01L25/065 ; H01L25/18 ; H05K1/02 ; H01L25/07 ; H01L23/12 ; H01L21/56

Abstract:
A method of manufacturing an electronic-component-embedded substrate includes forming a power-supplying metal layer on a base, forming through electrodes that are to be connected to the power-supplying metal layer on the power-supplying metal layer by an electrolytic plating method, forming a first wiring line by patterning the power-supplying metal layer, forming an interlayer insulating layer such that the interlayer insulating layer covers a portion of the first wiring line, and forming a second wiring line on at least a portion of the first wiring line and a portion of the interlayer insulating layer such that the second wiring line crosses, on the interlayer insulating layer, a portion of the first wiring line.
Public/Granted literature
Information query
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