Invention Grant
- Patent Title: Plasma generation apparatus
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Application No.: US16461687Application Date: 2018-01-02
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Publication No.: US11211231B2Publication Date: 2021-12-28
- Inventor: Hyo Chang Lee , Jung-Hyung Kim , Dae-Jin Seong
- Applicant: Korea Research Institute of Standards and Science
- Applicant Address: KR Daejeon
- Assignee: Korea Research Institute of Standards and Science
- Current Assignee: Korea Research Institute of Standards and Science
- Current Assignee Address: KR Daejeon
- Agency: Central California IP Group, P.C.
- Agent Andrew D. Fortney
- Priority: KR10-2017-0000559 20170103
- International Application: PCT/KR2018/000008 WO 20180102
- International Announcement: WO2018/128339 WO 20180712
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H05H1/24 ; H05H1/46
Abstract:
A plasma generation apparatus includes a plasma generation unit. The plasma generation unit has a spherical or elliptical cavity. The plasma generation unit receives radio-frequency (RF) power in such a manner that bounce resonance of electrons is performed to generate plasma in the cavity. The cavity has a plasma extraction hole to communicate with an external space.
Public/Granted literature
- US20190355558A1 Plasma Generation Apparatus Public/Granted day:2019-11-21
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