Invention Grant
- Patent Title: Extreme ultraviolet light generation apparatus and extreme ultraviolet light generation apparatus controlling method
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Application No.: US16786542Application Date: 2020-02-10
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Publication No.: US11211239B2Publication Date: 2021-12-28
- Inventor: Atsushi Ueda , Takashi Saito
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01J61/28
- IPC: H01J61/28 ; H01J61/02 ; H01J61/12

Abstract:
An EUV light generation apparatus includes: a chamber; an EUV light condensing mirror positioned inside the chamber and having a reflective surface that determines a first focal point and a second focal point, the reflective surface and the second focal point being positioned on respective sides of a first surface; at least one magnet configured to generate a magnetic field at and around the first focal point; a first gas supply unit configured to supply first gas to the reflective surface in the chamber and opened near an outer peripheral part of the reflective surface; a second gas supply unit configured to supply second gas into the chamber and opened at a position between the first surface and the second focal point; and a discharge device configured to discharge gas inside the chamber and opened at a position between the first focal point and the at least one magnet.
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