Invention Grant
- Patent Title: Ion source and method
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Application No.: US17330464Application Date: 2021-05-26
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Publication No.: US11217426B2Publication Date: 2022-01-04
- Inventor: Tim Weichsel
- Applicant: VON ARDENNE Asset GmbH & Co. KG
- Applicant Address: DE Dresden
- Assignee: VON ARDENNE Asset GmbH & Co. KG
- Current Assignee: VON ARDENNE Asset GmbH & Co. KG
- Current Assignee Address: DE Dresden
- Agency: Viering, Jentschura & Partner
- Priority: DE102020114162.9 20200527
- Main IPC: H01J37/30
- IPC: H01J37/30 ; H01J37/08 ; H01J27/14

Abstract:
An ion source can have: a multiplicity of electrodes, which are mounted electrically separated from one another and have: a first electrode, which has a depression; a second electrode, which is arranged in the depression; a third electrode, which partially covers the depression and through which a slit passes which exposes the second electrode; one or more than one magnet, which is designed to provide a magnetic field in the slit.
Public/Granted literature
- US20210375584A1 ION SOURCE AND METHOD Public/Granted day:2021-12-02
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