Invention Grant
- Patent Title: Switched closed loop read-out methods and systems for resonant sensing platforms
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Application No.: US15201144Application Date: 2016-07-01
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Publication No.: US11221354B2Publication Date: 2022-01-11
- Inventor: Georgios C. Dogiamis , Sasha N. Oster , Feras Eid , Ian A. Young
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: G01R23/02
- IPC: G01R23/02 ; G01D5/00 ; H01L23/00 ; G01D18/00 ; G01P15/097

Abstract:
Embodiments of the invention include a resonant sensing system comprising driving circuitry to generate a drive signal during excitation time periods, a first switch coupled to the driving circuitry, and a sensing device coupled to the driving circuitry via the first switch during the excitation time periods. The sensing device includes beams to receive the drive signal during a first excitation time period that causes the beams to mechanically oscillate and generate a first induced electromotive force (emf) in response to the drive signal. The first switch decouples the sensing device and the driving circuitry during measurement time periods for measurement of the induced emf.
Public/Granted literature
- US20180003749A1 SWITCHED CLOSED LOOP READ-OUT METHODS AND SYSTEMS FOR RESONANT SENSING PLATFORMS Public/Granted day:2018-01-04
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