Invention Grant
- Patent Title: Multi-cell detector for charged particles
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Application No.: US16652398Application Date: 2018-09-28
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Publication No.: US11222766B2Publication Date: 2022-01-11
- Inventor: Joe Wang , Yongxin Wang , Zhong-Wei Chen , Xuerang Hu
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- International Application: PCT/EP2018/076477 WO 20180928
- International Announcement: WO2019/063794 WO 20190404
- Main IPC: H01J37/244
- IPC: H01J37/244 ; H01J37/28

Abstract:
A multi-cell detector may include a first layer having a region of a first conductivity type and a second layer including a plurality of regions of a second conductivity type. The second layer may also include one or more regions of the first conductivity type. The plurality of regions of the second conductivity type may be partitioned from one another by the one or more regions of the first conductivity type of the second layer. The plurality of regions of the second conductivity type may be spaced apart from one or more regions of the first conductivity type in the second layer. The detector may further include an intrinsic layer between the first and second layers.
Public/Granted literature
- US20200286708A1 MULTI-CELL DETECTOR FOR CHARGED PARTICLES Public/Granted day:2020-09-10
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