Invention Grant
- Patent Title: Broadband radiation generation in hollow-core fibers
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Application No.: US17019972Application Date: 2020-09-14
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Publication No.: US11226535B2Publication Date: 2022-01-18
- Inventor: Yongfeng Ni
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: EP19198064 20190918,EP19202163 20191009
- Main IPC: G02F1/35
- IPC: G02F1/35 ; G02F1/365 ; G02F1/355

Abstract:
Radiation source assemblies and methods for generating broadened radiation by spectral broadening. A radiation source assembly includes a pump source configured to emit modulated pump radiation at one or more wavelengths. The assembly further has an optical fiber configured to receive the modulated pump radiation emitted by the pump source, the optical fiber including a hollow core extending along at least part of a length of the fiber. The hollow core is configured to guide the received radiation during propagation through the fiber. The radiation emitted by the pump source includes first radiation at a pump wavelength, and the pump source is configured to modulate the first radiation for stimulating spectral broadening in the optical fiber.
Public/Granted literature
- US20210080803A1 BROADBAND RADIATION GENERATION IN HOLLOW-CORE FIBERS Public/Granted day:2021-03-18
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