Invention Grant
- Patent Title: Fluid handling structure and lithographic apparatus
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Application No.: US17186117Application Date: 2021-02-26
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Publication No.: US11231653B2Publication Date: 2022-01-25
- Inventor: Erik Henricus Egidius Catharina Eummelen , Giovanni Luca Gattobigio , Johannes Cornelis Paulus Melman , Han Henricus Aldegonda Lempens , Miao Yu , Cornelius Maria Rops , Ruud Olieslagers , Artunç Ulucan , Theodorus Wilhelmus Polet , Patrick Johannes Wilhelmus Spruytenburg
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: EP16151117 20160113,EP16154229 20160204,EP16173708 20160609
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01L21/027

Abstract:
An immersion lithographic apparatus having a fluid handling structure, the fluid handling structure configured to confine immersion fluid to a region and including: a meniscus controlling feature having an extractor exit on a surface of the fluid handling structure; and a gas knife system outwards of the extractor exit and including passages each having an exit, the passages having a plurality of first passages having a plurality of corresponding first exits on the surface, and a plurality of second passages having a plurality of corresponding second exits outwards of the first exits on the surface, wherein the surface faces and is substantially parallel to a top surface of a substrate during exposure, and the first exits and the second exits are arranged at a greater distance from the substrate than the extractor exit.
Public/Granted literature
- US20210181641A1 FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS Public/Granted day:2021-06-17
Information query
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