Invention Grant
- Patent Title: Metrology tools comprising aplanatic objective singlet
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Application No.: US16875012Application Date: 2020-05-15
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Publication No.: US11237484B2Publication Date: 2022-02-01
- Inventor: Ferry Zijp
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP19175086 20190517
- Main IPC: H01L21/027
- IPC: H01L21/027 ; G03F7/20 ; G01N21/956
Abstract:
A metrology tool, an aplanatic singlet lens, and a method of designing an aplanatic singlet lens are provided. The metrology tool is for determining a characteristic of a structure on a substrate. The metrology tool comprises an optical detection system for detecting radiation over a wavelength range. The optical detection system comprises an aplanatic singlet lens for focusing the radiation on to a detector. The aplanatic singlet lens has a n aplanatic wavelength which is within the wavelength range.
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