Invention Grant
- Patent Title: Reflective optical element for a radiation beam
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Application No.: US17048834Application Date: 2019-04-10
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Publication No.: US11237491B2Publication Date: 2022-02-01
- Inventor: Ramon Mark Hofstra , Andrey Sergeevich Tychkov , Francois Charles Dominique Deneuville , Gerardus Hubertus Petrus Maria Swinkels , Petrus Adrianus Theodorus Maria Ruijs
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP18169071 20180424
- International Application: PCT/EP2019/059105 WO 20190410
- International Announcement: WO2019/206637 WO 20191031
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B27/14
Abstract:
A system comprises a reflective optical element with a reflective surface that is configured to reflect a radiation beam. The reflective optical element also has a body. The system includes a thermal conditioning mechanism operative to thermally induce a deformation of the body under control of a controller. By means of controllably deforming the body, the shape of the reflective surface can be adjusted in a controlled manner.
Public/Granted literature
- US20210165336A1 Reflective Optical Element for a Radiation Beam Public/Granted day:2021-06-03
Information query
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