Invention Grant
- Patent Title: Microfabrication method
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Application No.: US14417466Application Date: 2013-07-26
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Publication No.: US11242284B2Publication Date: 2022-02-08
- Inventor: Akihiro Shibata , Naoto Kaneko , Tsunemoto Kuriyagawa
- Applicant: DEXERIALS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DEXERIALS CORPORATION
- Current Assignee: DEXERIALS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JPJP2012-165835 20120726,JPJP2013-120978 20130607,JPJP2013-155937 20130726,JPJP2013-155938 20130726
- International Application: PCT/JP2013/070383 WO 20130726
- International Announcement: WO2014/017655 WO 20140130
- Main IPC: C23C18/00
- IPC: C23C18/00 ; C03C23/00 ; C03C17/02 ; C03C3/06 ; C03C17/245

Abstract:
A microfabrication method is provided with which it is possible to easily form a fine periodic structure on a surface of any substrate. A glass precursor is applied to a substrate, and the glass precursor is irradiated with short-pulse laser light. By the irradiation with short-pulse laser light, the glass precursor is activated to undergo a thermal reaction, and a fine periodic structure can be easily formed on the surface. Furthermore, by oxidizing the substrate on which the fine periodic structure has been formed, the hue of the surface can be improved while maintaining the fine periodic structure.
Public/Granted literature
- US20150274586A1 MICROFABRICATION METHOD Public/Granted day:2015-10-01
Information query
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