- 专利标题: Encoder apparatus, drive apparatus, stage apparatus, and robot apparatus
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申请号: US16036380申请日: 2018-07-16
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公开(公告)号: US11243096B2公开(公告)日: 2022-02-08
- 发明人: Masahiko Goto
- 申请人: NIKON CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: NIKON CORPORATION
- 当前专利权人: NIKON CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff PLC
- 优先权: JPJP2016-007468 20160118
- 主分类号: G01D5/34
- IPC分类号: G01D5/34 ; G01D5/347 ; B25J19/02 ; G01D5/244 ; G01D5/56 ; G01D5/58 ; G01D5/14
摘要:
Provided is an encoder apparatus capable of reducing frequency of maintenance of a battery. An encoder apparatus includes: a position detection system including a detector that detects position information on a mover; an electric signal generator that generates an electric signal in response to movement of the mover; and a battery that supplies at least a part of power consumed by the position detection system in accordance with the electric signal generated by the electric signal generator.
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