A method is used for optical scanning of at least one object region placed on a transparent specimen holder. The method is as follows: for each sample lateral position of plural predefined sample lateral positions performing a focus determination by: performing laser reflection and using a first camera taking plural first images to determine a reference distance between the specimen holder and an objective lens; performing transmission flash illumination and using a second camera taking plural second images to define a focus distance taking into account the reference distance; after completing the focus determination, determining a focus distance topology across the object region based on the focus distances determined for ail sample lateral positions; and laterally moving the specimen holder and acquiring third images while focusing according to the focus distance topology.