- 专利标题: Array substrate, method for manufacturing the same and display device
-
申请号: US16859558申请日: 2020-04-27
-
公开(公告)号: US11244972B2公开(公告)日: 2022-02-08
- 发明人: Ning Liu , Bin Zhou , Jun Liu , Qinghe Wang , Wei Song , Wei Li
- 申请人: Hefei Xinsheng Optoelectronics Technology Co., Ltd. , BOE Technology Group Co., Ltd.
- 申请人地址: CN Anhui; CN Beijing
- 专利权人: Hefei Xinsheng Optoelectronics Technology Co., Ltd.,BOE Technology Group Co., Ltd.
- 当前专利权人: Hefei Xinsheng Optoelectronics Technology Co., Ltd.,BOE Technology Group Co., Ltd.
- 当前专利权人地址: CN Anhui; CN Beijing
- 代理机构: Nath, Goldberg & Meyer
- 代理商 Joshua B. Goldberg
- 优先权: CN201911227758.8 20191204
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L27/00 ; H01L29/00 ; H01L27/12 ; H01L21/02 ; H01L29/24 ; H01L29/66 ; H01L29/786
摘要:
An array substrate, a method for manufacturing the same and a display device are provided. The method includes: providing a base substrate; forming a conductive material thin film on the base substrate; forming a first photoresist layer on a side of the conductive material thin film distal to the base substrate; etching the conductive material thin film by using the first photoresist layer as a mask to obtain a first etched pattern; removing third covering portions of the first photoresist layer to obtain a second photoresist layer; and etching the first etched pattern by using the second photoresist layer as a mask to obtain a gate electrode and a signal line.
公开/授权文献
信息查询
IPC分类: