Invention Grant
- Patent Title: Array substrate, method for manufacturing the same and display device
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Application No.: US16859558Application Date: 2020-04-27
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Publication No.: US11244972B2Publication Date: 2022-02-08
- Inventor: Ning Liu , Bin Zhou , Jun Liu , Qinghe Wang , Wei Song , Wei Li
- Applicant: Hefei Xinsheng Optoelectronics Technology Co., Ltd. , BOE Technology Group Co., Ltd.
- Applicant Address: CN Anhui; CN Beijing
- Assignee: Hefei Xinsheng Optoelectronics Technology Co., Ltd.,BOE Technology Group Co., Ltd.
- Current Assignee: Hefei Xinsheng Optoelectronics Technology Co., Ltd.,BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Anhui; CN Beijing
- Agency: Nath, Goldberg & Meyer
- Agent Joshua B. Goldberg
- Priority: CN201911227758.8 20191204
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/00 ; H01L29/00 ; H01L27/12 ; H01L21/02 ; H01L29/24 ; H01L29/66 ; H01L29/786

Abstract:
An array substrate, a method for manufacturing the same and a display device are provided. The method includes: providing a base substrate; forming a conductive material thin film on the base substrate; forming a first photoresist layer on a side of the conductive material thin film distal to the base substrate; etching the conductive material thin film by using the first photoresist layer as a mask to obtain a first etched pattern; removing third covering portions of the first photoresist layer to obtain a second photoresist layer; and etching the first etched pattern by using the second photoresist layer as a mask to obtain a gate electrode and a signal line.
Public/Granted literature
- US20210175263A1 ARRAY SUBSTRATE, METHOD FOR MANUFACTURING THE SAME AND DISPLAY DEVICE Public/Granted day:2021-06-10
Information query
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