Invention Grant
- Patent Title: Vertical field effect transistor with self-aligned contact structure and layout
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Application No.: US16883308Application Date: 2020-05-26
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Publication No.: US11257913B2Publication Date: 2022-02-22
- Inventor: Hwi Chan Jun , Jung Ho Do
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L27/092 ; H01L29/423 ; H01L29/78

Abstract:
Provided is a structure of a vertical field effect transistor (VFET) device which includes: a fin structure protruding from a substrate, and having an H-shape in a plan view; a gate including a fin sidewall portion formed on sidewalls of the fin structure, and a field gate portion extended from the fin sidewall portion and filling a space inside a lower half of the fin structure; a gate contact landing on the field gate portion at a position inside the lower half of the fin structure; a bottom epitaxial layer comprising a bottom source/drain (S/D) region, and formed below the fin structure; a power contact landing on the bottom epitaxial layer, and configured to receive a power signal; a top S/D region formed above the fin structure; and a top S/D contact landing on the top S/D region.
Public/Granted literature
- US20210111257A1 VERTICAL FIELD EFFECT TRANSISTOR WITH SELF-ALIGNED CONTACT STRUCTURE AND LAYOUT Public/Granted day:2021-04-15
Information query
IPC分类: