Invention Grant
- Patent Title: In-situ DC plasma for cleaning pedestal heater
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Application No.: US17024955Application Date: 2020-09-18
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Publication No.: US11260432B2Publication Date: 2022-03-01
- Inventor: Tejas Ulavi , Arkaprava Dan , Sanjeev Baluja , Wei V. Tang
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: B08B7/00
- IPC: B08B7/00

Abstract:
Substrate supports, substrate support assemblies and methods of using an arc generated between a first electrode and a second electrode to clean a support surface. The first electrode comprises a plurality of first branches which are interdigitated with a plurality of branches of the second electrode in a finger-joint like pattern creating a gap between the first electrode and the second electrode.
Public/Granted literature
- US20210086239A1 In-Situ DC Plasma For Cleaning Pedestal Heater Public/Granted day:2021-03-25
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