- 专利标题: Hermetically sealed package
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申请号: US16529229申请日: 2019-08-01
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公开(公告)号: US11264296B2公开(公告)日: 2022-03-01
- 发明人: Ming-Huang Huang , Hoon Kim , Xu Ouyang
- 申请人: Corning Incorporated
- 申请人地址: US NY Corning
- 专利权人: Corning Incorporated
- 当前专利权人: Corning Incorporated
- 当前专利权人地址: US NY Corning
- 主分类号: H01L23/31
- IPC分类号: H01L23/31 ; H01L21/56 ; B81B7/00 ; H01L21/02 ; H01L21/768 ; H01L23/498
摘要:
An electrical component package includes a glass substrate, an interposer panel positioned on the glass substrate, the interposer panel comprising a device cavity, a wafer positioned on the interposer panel such that the device cavity is enclosed by the glass substrate, the interposer panel, and the wafer. The electrical component package further includes a metal seed layer disposed between the interposer panel and the wafer, and a dielectric coating. The dielectric coating hermetically seals the interposer panel to the glass substrate, the interposer panel to the metal seed layer and the wafer, and the interposer panel hermetically seals the metal seed layer to the glass substrate such that the device cavity is hermetically sealed from ambient atmosphere.
公开/授权文献
- US20200051883A1 HERMETICALLY SEALED PACKAGE 公开/授权日:2020-02-13
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