Invention Grant
- Patent Title: Temperature measurement using etalons
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Application No.: US16513842Application Date: 2019-07-17
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Publication No.: US11280686B2Publication Date: 2022-03-22
- Inventor: Samuel C. Howells , Bruce E. Adams
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: G01K11/00
- IPC: G01K11/00

Abstract:
A method includes exposing a sample etalon-object to sample incident radiation, resulting in a sample transmitted radiation and sample reflected radiation; exposing a reference etalon-object to reference incident radiation, resulting in a reference transmitted radiation and reference reflected radiation; and analyzing resultant radiation for a heterodyned spectrum. The sample transmitted radiation may become the reference incident radiation, and the reference transmitted radiation may become the resultant radiation. The reference transmitted radiation may become the sample incident radiation, and the sample transmitted radiation may become the resultant radiation. The sample transmitted radiation may become the reference incident radiation, and the reference reflected radiation may become the resultant radiation. The reference transmitted radiation may become the sample incident radiation, and the sample reflected radiation may become the resultant radiation.
Public/Granted literature
- US20200025631A1 TEMPERATURE MEASUREMENT USING ETALONS Public/Granted day:2020-01-23
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