发明授权
- 专利标题: Method and device for inspecting a surface of an object comprising nonsimilar materials
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申请号: US16967649申请日: 2019-01-25
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公开(公告)号: US11287246B2公开(公告)日: 2022-03-29
- 发明人: Jean-François Boulanger , Stéphane Godny
- 申请人: UNITY SEMICONDUCTOR , COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 申请人地址: FR Montbonnot-Saint-Martin; FR Paris
- 专利权人: UNITY SEMICONDUCTOR,COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人: UNITY SEMICONDUCTOR,COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人地址: FR Montbonnot-Saint-Martin; FR Paris
- 代理机构: Greer, Burns & Crain, Ltd
- 优先权: FR1850936 20180205
- 国际申请: PCT/EP2019/051894 WO 20190125
- 国际公布: WO2019/149638 WO 20190808
- 主分类号: G01B11/14
- IPC分类号: G01B11/14 ; G01B11/24 ; G01B11/06 ; G01N21/95
摘要:
A method and related device for measuring the profile of a surface of an object to be measured having zones made from at least two different materials, the object to be measured forming part of a plurality of substantially identical objects, the plurality of objects also including at least one reference object having at least one reference surface, the method including the following steps: determining a correction function, from a first profile signal of a first reference surface and a second profile signal from a second reference surface, the second reference surface being metallized; acquiring a profile signal from the surface of the object to be measured; and applying the correction function to the profile signal from the surface of the object to be measured to obtain a corrected profile signal; the profile signals being obtained from interferometric measurements.
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