- Patent Title: Pressure sensor having unevenness and manufacturing method therefor
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Application No.: US16616685Application Date: 2018-02-06
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Publication No.: US11287343B2Publication Date: 2022-03-29
- Inventor: Joo Yong Kim , Min Ki Choi
- Applicant: FOUNDATION OF SOONGSIL UNIVERSITY INDUSTRY COOPERATION
- Applicant Address: KR Seoul
- Assignee: FOUNDATION OF SOONGSIL UNIVERSITY INDUSTRY COOPERATION
- Current Assignee: FOUNDATION OF SOONGSIL UNIVERSITY INDUSTRY COOPERATION
- Current Assignee Address: KR Seoul
- Agency: Hauptman Ham, LLP
- Priority: KR10-2017-0121132 20170920
- International Application: PCT/KR2018/001596 WO 20180206
- International Announcement: WO2019/059469 WO 20190328
- Main IPC: G01L13/02
- IPC: G01L13/02 ; H01L41/113

Abstract:
A pressure sensor having unevenness and a manufacturing method therefor are disclosed. The disclosed pressure sensor senses pressure in a vertical direction and includes a first pressure sensor unit and a second pressure sensor unit, wherein the first pressure sensor unit and the second pressure sensor unit are stacked, and unevenness is formed on the upper surface of the first pressure sensor unit and on the lower surface of the second pressure sensor unit.
Public/Granted literature
- US20200209088A1 PRESSURE SENSOR HAVING UNEVENNESS AND MANUFACTURING METHOD THEREFOR Public/Granted day:2020-07-02
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